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PtSi CONTACT METALLURGY BY DIFFERENT FORMATION PROCESSES

Author(s):
Chang, Chin-An
Huang, H.-C. W.
Segmuller, A.
Turene, F.E.
Cunningham, B.
Sugerman, A.
Totta, P.A.
2 more
Publication title:
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
54
Pub. Year:
1985
Page(from):
775
Page(to):
780
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837197 [0931837197]
Language:
English
Call no.:
M23500/54
Type:
Conference Proceedings

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