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AMORPHOUS W-Zr FILMS AS DIFFUSION BARRIERS BETWEEN Al AND Si

Author(s):
So, F.C.T.
Zhao, X.-A.
Kolawa, E.
Tandon, J.L.
Zhu, M.F.
Nicolet, M.-A.
1 more
Publication title:
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
54
Pub. Year:
1985
Page(from):
139
Page(to):
146
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837197 [0931837197]
Language:
English
Call no.:
M23500/54
Type:
Conference Proceedings

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