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*DOPANT REDISTRIBUTION DURING SILICIDE FORMATION

Author(s):
Ohdomari, I.
Konuma, K.
Takano, M.
Chikyow, T.
Kawarada, H.
Nakanishi, J.
Ueno, T.
2 more
Publication title:
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
54
Pub. Year:
1985
Page(from):
63
Page(to):
72
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837197 [0931837197]
Language:
English
Call no.:
M23500/54
Type:
Conference Proceedings

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