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HIGH-QUALITY THIN Si FILM BY SPE REGROWTN ON EPITAXIALLY GROWN SPINEL

Author(s):
Kimura, T.
Yamawaki, H.
Arimoto, Y.
Ikeda, K.
Ihara, M.
Ozeki, M.
1 more
Publication title:
Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
53
Pub. date:
1985
Page(from):
143
Page(to):
148
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837180 [0931837189]
Language:
English
Call no.:
M23500/53
Type:
Conference Proceedings

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