SiO2 GROWTH AND ANNEALING BY LAMP HEATING

SiO2 GROWTH AND ANNEALING BY LAMP HEATING

Author(s):

Publication title:

Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

52

Pub. Year:

1985

Page(from):

327

Page(to):

332

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837173 [0931837170]

Language:

English

Call no.:

M23500/52

Type:

Conference Proceedings

Details

TDL ID:	ZA00015538
Series ID:	PA00000011
Conf. info. (Name):	Symposium on rapid thermal processing
Conf. info. (Number):	1985
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1985.12.02-1985.12.04

Similar Items:

1 Conference Proceedings SHORT TIME ANNEALING OF As and B ION IMPLANTED Si USING TUNGSTEN-HALOGEN LAMPS Sedgwick, T. O., Kalish, R., Mader, S. R., Shatas, S. C. North-Holland	7 Conference Proceedings UHV-MOCVD GROWTH AND IN SITU CHARACTERIZATION OF EPITAXIAL TiO2 FILMS Chen, Samuel, Gysling, H.J., Paz-Pujalt, G.R., Blanton, T.N., Castro, T., Chen, K.M., Fictorie, C., Gladfelter, W.L., … Materials Research Society
2 Conference Proceedings POST OXIDATION ANNEAL AND RE-OXIDATION EFFECTS IN 5 nm SiO2 FILMS Dori, L., Arienzo, M., Sun, Y.C., Nguyen, T.N., Wetzel, J. Materials Research Society	8 Conference Proceedings PULSED LASER ANNEALING OF BURIED DAMAGE IN ION IMPLANTED DIAMOND Prawer, Steven, Jamieson, D. N., Dooley, S. P., Spizzirri, P., Ghiggino, K. P., Kalish, R. Materials Research Society
3 Conference Proceedings RAPID THERMAL ANNEALING OF DEPOSITED SiO2 FILMS Wong, J., Lu, T-M., Cohen, S. S., Mehta, S. Materials Research Society	9 Conference Proceedings "Development of an immunoassay for determination of 2,4-dichlorophenoxyacetic acid (2,4-D) based upon the recombinant Fab fragment of 2,4-D specific antibody" Nguyen,V.C., Nguyen,T.D.T., Dau,H.A., Tham,T.N., Quyen,D.T., Bachmman,T., Schmid,R.D. SPIE-The International Society for Optical Engineering
4 Conference Proceedings ION-IMPLANTATION EFFECTS ON SPIN-ON-GLASS (SOL-GEL) SiO2 FILMS Shacham-Diamand, Y., Moriya, N., Kalish, R. Materials Research Society	10 Conference Proceedings Visible Photoluminescence from Si Ion-Implanted and Thermally-Annealed SiO2 Films Kanemitsu, Y., Shimizu, N., Okamoto, S., Komoda, T., Hemment, P. L. F., Seaiy, B. J. MRS - Materials Research Society
5 Conference Proceedings Growth Signal Transduction Proteins as Biomarkers of Occupational Exposures Brandt-Rauf,P.W., Do,T.N., Weinberg,M.D., Smith,S.J. IOS Press	11 Conference Proceedings The Influence of Annealing Temperature and Doping on the Red/Near-Infrared Luminescence of Ion Implanted SiO2:nc-Si Tetelbaum, D,I., Burdov, V.A., Trushin, S.A., Mikhaylov, A.N., Revin, D.G., Gaponova, D.M. Materials Research Society
6 Conference Proceedings A METHOD FOR RAPID THERMAL ANNEALING OF COMPOUND SEMI-CONDUCTORS BY CW CO2 LASER IRRADIATION Neta, U., Richter, V., Kalish, R. Materials Research Society	12 Conference Proceedings HIGH QUALITY DEPOSITION OF SiO2 DOWNSTREAM FROM A MICROWAVE DISCHARGE Robinson, B., Hoh, P. D., Madakson, P., Nguyen, T. N., Shivashankar, S. A. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12