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COMPARISON OF SHORT TIME ANNEALING OF IMPLANTED SILICON LAYERS WITH TUNGSTEN-HALOGEN LAMP AND MERCURY ARC LAMP SOURCES

Author(s):
Publication title:
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
52
Pub. date:
1985
Page(from):
217
Page(to):
224
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837173 [0931837170]
Language:
English
Call no.:
M23500/52
Type:
Conference Proceedings

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