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STRUCTURAL CHANGES DURING TRANSIENT POST-ANNEALING OF PREANNEALED AND ARSENIC IMPLANTED POLYCRYSTALLINE SILICON FILMS

Author(s):
Krause, S.J.
Wilson, S.R.
Gregory, R.B.
Paulson, W.M.
Leavitt, J.A.
McIntyre Jr., L.C.
Seerveld, J.L.
Stoss, P.
3 more
Publication title:
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
52
Pub. date:
1985
Page(from):
145
Page(to):
152
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837173 [0931837170]
Language:
English
Call no.:
M23500/52
Type:
Conference Proceedings

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