Blank Cover Image

DIFFUSION AND ACTIVATION DURING RAPID THERMAL ANNEALING OF IMPLANTED BORON IN SILICON

Author(s):
Cowern, N.E.B.
Yallup, K.J.
Godfrey, D.J.
Hasko, D.G.
McMahon, R.A.
Ahmed, H.
Stobbs, W.M.
McPhail, D.S.
3 more
Publication title:
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
52
Pub. date:
1985
Page(from):
65
Page(to):
72
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837173 [0931837170]
Language:
English
Call no.:
M23500/52
Type:
Conference Proceedings

Similar Items:

Godfrey, D. J., McMahon, R. A., Hasko, D. G., Ahmed, H., Dowsett, M. G.

Materials Research Society

C.J. Bonifas, K. Thomson, J.H. Booske, R.F. Cooper, M. Alvarez

American Institute of Chemical Engineers

McMahon, R. A., Hasko, D. G., Ahmed, H., Stobbs, W. M., Godfrey, D. J.

Materials Research Society

C.J. Bonifas, K. Thomson, J.H. Booske, R.F. Cooper, M. Alvarez

American Institute of Chemical Engineers

Smith, D. A., McMahon, R. A., Ahmed, H., Godfrey, D. J.

Materials Research Society

Ganin, E., Sai-Halasz, G. A., Sedgwick, T.O

Materials Research Society

Williams, D.A., McMahon, R.A., Hasko, D.G., Ahmed, H., Hopper, G.F., Godfrey, D.J.

Materials Research Society

Cowern, N.E.B.

Electrochemical Society

Kim, Y. N., Lo, G. Q., Kwong, D. L., Tseng, H. H., Hance, R.

Materials Research Society

Liu, Hung-Yu,, Chang, Peng-Heng, Lie, Jiann, Mao, Bor-Yen

Materials Research Society

Uppal, Suresh, Willoughby, A.F.W., Bonar, J.M., Cowern, N.E.B., Morris, R.J.H., Dowsett, M.G.

Materials Research Society

Timans, P. J., McMahon, R. A., Ahmed, H.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12