Blank Cover Image

ION BEAM DEPOSITION OF MATERIALS AT 40-200 eV: EFFECT OF ION ENERGY AND SUBSTRATE TEMPERATURE ON INTERFACE, THIN FILM AND DAMAGE FORMATION

Author(s):
Publication title:
Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
51
Pub. Year:
1985
Page(from):
369
Page(to):
374
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837166 [0931837162]
Language:
English
Call no.:
M23500/51
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings *INVESTIGATIONS OF LOW-TEMPERATURE EPITAXY, ION DAMAGE, AND REACTIVE-ION CLEANING UTILIZING ION BEAM DEPOSITION

Appleton, B.R., Zuhr, R.A., Noggle, T.S., Herbots, N., Pennycook, S.J.

Materials Research Society
7 Conference Proceedings COHERENT PRECIPITATE FORMATION IN PULSED-LASER AND THERMALLY ANNEALED, ION-IMPLANTED Si

Appleton, B. R.., Narayan, J., Holland,. O, W.,, Pennycook, S. J.

North-Holland
2 Conference Proceedings *INVESTIGATIONS OF LOW-TEMPERATURE EPITAXY, ION DAMAGE, AND REACTIVE-ION CLEANING UTILIZING ION BEAM DEPOSITIOIN

Appleton, B.R., Zuhr, R.A., Noggle, T.S., Herbots, N., Pennycook, S.J.

Materials Research Society
8 Conference Proceedings DAMAGE TO CRYSTALLINE SILICON FOLLOWING IMPLANTATION BY LOW ENERGY SILICON IONS

Levin, Y., Herbots, N, Dunham, S.

Materials Research Society
3 Conference Proceedings *DIRECT FORMATION OF THIN FILMS AND EPITAXIAL OVERLAYERS AT LOW TEMPERATURES USING A LOW-ENERGY (10-500 eV) ION BEAM DEPOSITION SYSTEM

Zuhr, R. A, Alton, G. D., Appleton, B. R., Herbots, N., Noggle, T. S., Pennycook, S. J.

Materials Research Society
9 Conference Proceedings ION BEAM, RAPID THERMAL, AND LASER MIXING PHENIMENA IN INSULATORS

Narayan,J., Appleton, B.R.

Materials Research Society
4 Conference Proceedings METAL SILICIDES FORMED BY DIRECT ION BEAM DEPOSITION

Zuhr, R.A., Pennycook, S.J., Haynes, T.E., Holland, O.W.

Materials Research Society
10 Conference Proceedings FORMATION OF STABLE POINT DEFECTS IN ION-IMPLANTED Si

Culbertson, R.J., Pennycook, S.J.

Materials Research Society
5 Conference Proceedings HETEROEPITAXY ON GaAs ON Si AND Ge BY LOW-ENERGY ION BEAM DEPOSITION USING ALTERNATING BEAMS

Haynes, T. E., Zuhr, R. A., Pennycook, S. J,.

Materials Research Society
11 Conference Proceedings Ion channeling techniques for defect and surface studies

Appleton, B.R.

North Holland
6 Conference Proceedings GROWTH OF EPITAXIAL SiC LAYERS ONTO ON- AND OFF-AXIS 6H-SiC SUBSTRATES BY ION BEAM DEPOSITION

More, K.L., Withrow, S.P., Haynes, T.E., Zuhr, R.A.

Materials Research Society
12 Conference Proceedings *EPITAXY AND CHEMICAL REACTIONS DURING THIN FILM FORMATION FROM LOW ENERGY IONS: NEW KINETIC PATHWAYS, NEW PHASES, AND NEW PROPERTIES

Herbots, Nicole, Hellman, O. C., Vancauwenberghe, O.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12