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TRAPPING OF INTERSTITIALS DURING ION IMPLANTATION IN SILICON

Author(s):
Publication title:
Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
51
Pub. Year:
1985
Page(from):
357
Page(to):
362
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837166 [0931837162]
Language:
English
Call no.:
M23500/51
Type:
Conference Proceedings

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