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HYDROGENATED AMORPHOUS SILICON FILMS BY THE PYROLYSIS OF DISILANE

Author(s):
Chu, T.L.
Chu, S.S.
Ang, S.T.
Lo, D.H.
Duong, A.
Hwaung, C.G.
Book, L.
2 more
Publication title:
Materials issues in applications of amorphous silicon technology : symposium held April 15-17, 1985, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
49
Pub. Year:
1985
Page(from):
21
Page(to):
26
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837142 [0931837146]
Language:
English
Call no.:
M23500/49
Type:
Conference Proceedings

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