Blank Cover Image

CHARACTERIZATION OF DOPE Si-TiSi2 BILAYERS FORMED BY ION BEAM MXING AND RAPID THERMAL ANNEALING

Author(s):
Publication title:
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
45
Pub. Year:
1985
Page(from):
153
Page(to):
158
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837104 [0931837103]
Language:
English
Call no.:
M23500/45
Type:
Conference Proceedings

Similar Items:

Vandenabeele, P., Maex, K., De Keersmaecker, R.

Materials Research Society

Norstom, H., Maex, K., Vandenabeele, P.

Materials Research Society

Maex, K., De Keersmaecker, R. F., Van Rossum, M., van der Weg, W. F.

Materials Research Society

Norstrom, H., Maex, K., Vandenabeele, P.

Materials Research Society

3 Conference Proceedings Silicidation by Rapid Thermal Processing

Van den Hove L., De Keersmaecker F. R.

Plenum Press

Rosser, P. J., Tomkins, G. J.

Materials Research Society

Mouroux, A., Palmans, R., Keinonen, J., Zhang, S.-L., Maex, K., Petersson, C. S.

MRS - Materials Research Society

Clevenger, L. A., Cabral, C., Jr, Roy, R. A., Lavoie, C., Viswanathan, R., Saenger, K. L., Jordan-Sweet, J., Morales, …

MRS - Materials Research Society

Lowen, P. D., Jones, K. S., Ochoa, R., Simmons, J., Wang, Y. H., Park, R. M., Wilson, R.

Materials Research Society

Heyns, M. M., De Keersmaecker, R. F.

Materials Research Society

Chittipeddi, Sailesh, Kelly, Michael J., Dziuba, Chales M., Oates, Anthony S., Cochran, William T.

Materials Research Society

Maex K.

Kluwer Academic Publishers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12