Blank Cover Image

DISPLACEMENT OF ARSENIC FROM SUBSTITUTIONAL SITES IN SILICON BY MeV He+ IRRADIATION

Author(s):
Publication title:
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
45
Pub. date:
1985
Page(from):
123
Page(to):
136
Pages:
14
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837104 [0931837103]
Language:
English
Call no.:
M23500/45
Type:
Conference Proceedings

Similar Items:

Chan, S.S., Varker, C. J., Whitfield, J., Carpenter, R. W.

Materials Research Society

Krause, S. J., Jung, C. O., Ravi, T. S., Wilson, S. R., Burke, D. E.

Materials Research Society

Wilson, S. R., Paulson, W. M., Varker, C. J., Lowe, A., Gregory, R. B., Reuss, R. H., Wu, S. Y., Whitfield, J. D.

North-Holland

Carpenter, R. W., Chan, I, Tsi, H. I, Varker, C., Demer, L. J.

North-Holland

Whitfield, Jim D., Burnham, Marie E., Varker, Charles J., Wilson, Syd R.

Materials Research Society

Carroll, M.S., Sturm, J.C., Napolitani, E., Salvador, D. De, Berti, M., Stangl, J., Bauer, G., Tweet, D.J.

Materials Research Society

Varker, C. J., Whitfield, J. C., Fejes, P. L.

North-Holland

10 Conference Proceedings THE ION IMPLANTED ARSENIC TAIL IN SILICON

Beck, S. E., Jaccordine, R. J., Clark, C.

Materials Research Society

Krause, S.J., Wilson, S.R., Gregory, R.B., Paulson, W.M., Leavitt, J.A., McIntyre Jr., L.C., Seerveld, J.L., Stoss, P.

Materials Research Society

Nygren, E., Aziz, M. J., Turnbull, D., Hays, J. F., Poate, J. M., Jaconson, D. C., Hull, R.

Materials Research Society

VANDERSCHAEVE,G., CARPENTER,R.W., BARRY,J.C., VARKER,C.J., WILSON,S.R.

Trans Tech Publications

Klaver, A., Warman, J.M., Haas, M.P.de, Metselaar, J.W., Swaaij, R.A.C.M.M.van

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12