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OPTICAL BEHAVIOR OF SPUTTER DEPOSITED ALUMINUM NITRIDE: RELATIONSHIP TO FILM CHEMISTRY

Author(s):
Publication title:
Thin films : the relationship of structure to properties : symposium held April 15-17, 1985, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
47
Pub. Year:
1985
Page(from):
75
Page(to):
84
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837128 [093183712X]
Language:
English
Call no.:
M23500/47
Type:
Conference Proceedings

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