INFRARED MAPPING OF OXYGEN AND CORRELATION WITH ELECTRICAL MEASUREMENTS ON CZ GROWN WAFERS

INFRARED MAPPING OF OXYGEN AND CORRELATION WITH ELECTRICAL MEASUREMENTS ON CZ GROWN WAFERS

Author(s):

Publication title:

Microscopic identification of electronic defects in semiconductors : symposium held April 15-18, 1985, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

46

Pub. Year:

1985

Page(from):

275

Page(to):

280

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837111 [0931837111]

Language:

English

Call no.:

M23500/46

Type:

Conference Proceedings

Details

TDL ID:	ZA00015529
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microscopic identification of electronic defects in semiconductors
Conf. info. (Number):	1985
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1985.04.15-1985.04.18

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