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OXIDATION OF Au/Si FILMS FOR SELF-CONFINED INTERCONNECTS

Author(s):
Publication title:
Electronic packaging materials science : symposium held November 27-29, 1984, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
40
Pub. date:
1985
Page(from):
329
Page(to):
334
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837050 [0931837057]
Language:
English
Call no.:
M23500/40
Type:
Conference Proceedings

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