*PLASMA_ENHANCED CHEMICAL VAPOR DEPOSITION OF METAL AND METAL SILICIDE FILMS

*PLASMA_ENHANCED CHEMICAL VAPOR DEPOSITION OF METAL AND METAL SILICIDE FILMS

Author(s):: Hess, D. W.
Publication title:: Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 38
Pub. Year:: 1985
Page(from):: 315
Page(to):: 324
Pages:: 10
Pub. info.:: Pittsburgh, Pa.: Materials Research Society
ISSN:: 02729172
ISBN:: 9780931837036 [0931837030]
Language:: English
Call no.:: M23500/38
Type:: Conference Proceedings

Details

TDL ID:	ZA00015524
Series ID:	PA00000011
Conf. info. (Name):	Symposium on plasma synthesis and etching of electronic materials
Conf. info. (Number):	1984
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1984.11.26-1984.11.30

Similar Items:

1 Conference Proceedings Deposition and Etching of Amorphous Carbon Films Prepared by ECR-Plasma-Enhanced Benzene Chemical Vapor Deposition Chen, X-H., Tolbert, L. M., Ning, Z. Y., Hess, D. W. MRS - Materials Research Society	7 Conference Proceedings Polymorphous Silicon Nanowires Synthesized by Plasma-Enhanced Chemical Vapor Deposition Zeng, X.B., Liao, X.B., Diao, H.W., Hu, Z.H., Xu, Y.Y., Zhang, S.B., Chen, C.Y., Chen, W.D., Kong, G.L. Materials Research Society
2 Conference Proceedings Deposition of TiO2 thin films by plasma-enhanced chemical vapor deposition Li,W., Zhao,J., Zhao,X.-L., Cai,B. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Chemical Vapor Deposition of Zirconium Tin Titanate: A Dielectric Material for Potential Microelectronic Applications Mays, E., Hess, D., Rees, W. Electrochemical Society
3 Conference Proceedings PLASMA ENHANCED METAL-ORGANIC CHEMICAL VAPOR DEPOSITION OF GERMANIUM NITRIDE THIN FILMS Hoffman, David M., Rangarajan, Sri Prakash, Athavale, Satish D., Economou, Demetre J., Liu, Jia-Rui, Zheng, Zongshuang, … MRS - Materials Research Society	9 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF COBALT SILICIDE West, Gary A., Beeson, Karl W. Materials Research Society
4 Conference Proceedings Plasma enhanced chemical vapor deposition of high refractive index polymer films J. O. Enlow, H. Jiang, K. G. Eyink, J. T. Grant, W. Su Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings Deposition of nanocrystalline SiC films using helicon wave plasma enhanced chemical vapor deposition W. Lu, W. Yu, L. Ma, L. Wu, G. Fu Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings RBS/CHANNELING AND TEM ANALYSIS OF HETEROEPITAXIAL Ge FILMS ON GaAs GROWN BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION Parikh, N. R., Hattangady, S. V., Posthill, J. B., King, M. L., Rudder, R. A., Vitkavage, D. J., Markunas, R. J., Chu, … Materials Research Society	11 Conference Proceedings (727a) Enhanced Stability of Metal-Organic Frameworks Via Plasma-Enhanced Chemical Vapor Deposition Gregory W. Peterson, Jared DeCoste, Colin Willis, Martin Smith, Corinne Stone American Institute of Chemical Engineers
6 Conference Proceedings Modeling and Control of Plasma Enhanced Chemical Vapor Deposition Armaou, Antonios, Christofides, Panagiotis D. American Institute of Chemical Engineers	12 Conference Proceedings A Comparison of Diamond-Like Carbon Films Properties Obtained by Plasma Enhanced Chemical Vapor Deposition and Electro-Deposition N. Wang, J. Wang, F.W. Zheng, Y.M. Wu, B.R. Hou Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12