Blank Cover Image

THE INFLUENCE OF POINT DEFECTS ON DIFFUSION AND GETTERING IN SILICON

Author(s):
Publication title:
Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
36
Pub. Year:
1985
Page(from):
105
Page(to):
116
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837012 [0931837014]
Language:
English
Call no.:
M23500/36
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Point Defects, Diffusion, and Gettering in Silicon

Gosele, U., Conrad, D., Werner, P., Tong, Q-Y., Gafiteanu, R., Tan, T. Y.

MRS - Materials Research Society
7 Conference Proceedings Dislocation nucleation models from point defect condensations in silicon and germanium

Tan, T.Y.

North Holland
2 Conference Proceedings *MECHANISMS OF SELF-DIFFUSION AND OF DOPING-ENHANCEMENT OF SUPERLATTICE DISORDERING IN GaAs AND A1As COMPOUNDS

Tan, T. Y., Goselle, U.

Materials Research Society
8 Conference Proceedings Gold Diffusion in Silicon During Gettering by an Aluminum Layer

Joshi, Subhash M., Gosele, Ulrich M., Tan, Teh Y.

MRS - Materials Research Society
3 Conference Proceedings Intrinsic Point Defects and Diffusion Processes in Silicon

Tan, T. Y.

North-Holland
9 Conference Proceedings Precipitation of oxygen and intrinsic gettering in silicon

Tice, W.K., Tan, T.Y.

North Holland
4 Conference Proceedings The Influence of Carbon on the Effective Diffusivities of Intrinsic Point Defects in Silicon

Goesele, U., Ploessl, A., Tan, T.Y.

Electrochemical Society
10 Conference Proceedings Non-Equilibrium Point Defects and Diffusion in GaAs and Related Compounds

Gosele,U., Tan,T.Y., Uematsu,M., Wada,K.

Trans Tech Publications
5 Conference Proceedings The Influence of Cavities and Point Defects on Cu Gettering and B Diffusion in Si

Wong-Leung, J., Williams, J. S., Petravic, M.

MRS - Materials Research Society
11 Conference Proceedings ON THE INTERACTION OF INTRINSIC AND EXTRINSIC GETTERING SCHEMES IN SILICON

Yang, K. H., Tan, T. Y.

Materials Research Society
6 Conference Proceedings Recent Progresses in Understanding Gettering in Silicon

Tan, T.Y.

Materials Research Society
12 Conference Proceedings Minority Carrier Diffusion Length Improvement in Czochralski Silicon by Aluminum Gettering

Joshi, Subhash M., Gosele, Ulrich M., Tan, Teh Y.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12