TRANSITION METAL CONTAMINATION OF EPITAXIAL SILICON
- Author(s):
Scott, M. P. Caubin, L. Chen, D. C. Weber, E. R. Rose, J. Tucker, T. - Publication title:
- Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 36
- Pub. Year:
- 1985
- Page(from):
- 37
- Page(to):
- 42
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837012 [0931837014]
- Language:
- English
- Call no.:
- M23500/36
- Type:
- Conference Proceedings
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