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ANALYSIS OF HIGH-DOSE IMPLANTED SILICON BY HIGH-DEPTH RESOLUTION RBS AND SPECTROSCOPIC ELLIPSOMETRY AND TEM

Author(s):
Lohner, T.
Mezey, G.
Fried, M.
Ghita, L.
Ghita, C.
Mertens, A.
Kerkow, H.
Kotai, E.
Paszti, F.
Banyai, F.
Vizkelethy, G. Y.
Jaroli, E.
Gyulai, J.
Somogyi, M.
9 more
Publication title:
Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
35
Pub. date:
1985
Page(from):
523
Page(to):
528
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837005 [0931837006]
Language:
English
Call no.:
M23500/35
Type:
Conference Proceedings

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