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LATERAL SEEDING OF SILICON-ON-INSULATOR USING AN ELLIPTICAL LASER BEAM: A COMPARISON OF SCANNING METHODS

Author(s):
Publication title:
Comparison of thin film transistor and SOI technologies : symposium held February 1984 in Albuquerque, New Mexico, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
33
Pub. Year:
1984
Page(from):
81
Page(to):
86
Pages:
6
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444008992 [0444008993]
Language:
English
Call no.:
M23500/33
Type:
Conference Proceedings

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