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CHARACTERIZATION OF CMOS DEVICES IN 0.5-μm SILICON-ON-SAPPHIRE FILMS MODIFIED BY SOLID PHASE EPITAXY AND REGROWTH (SPEAR)

Author(s):
Publication title:
Comparison of thin film transistor and SOI technologies : symposium held February 1984 in Albuquerque, New Mexico, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
33
Pub. Year:
1984
Page(from):
35
Page(to):
40
Pages:
6
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444008992 [0444008993]
Language:
English
Call no.:
M23500/33
Type:
Conference Proceedings

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