Blank Cover Image

LASER-EXCITED FLOURESCENCE DETECTION OF Si2 DURING SILANE CVD

Author(s):
Publication title:
Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
29
Pub. Year:
1984
Page(from):
225
Page(to):
230
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008947 [0444008942]
Language:
English
Call no.:
M23500/29
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Laser Diagnostics and Numerical Modelling of Si Atom Density During CVD from Silane

Coltrin, M.E., Ho, P., Breiland, W.G.

American Institute of Chemical Engineers
7 Conference Proceedings laser-excited sychronous flourescence spectrometer for benzo(a)pyrene

D.M. Hueber, M. Del Olmo Iruela, C.L. Stevenson, T. Vo-Dinh

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Si Atom Density Profiles In a Rotating Disk CVD Reactor

Ho, P., Breiland, W.G., Coltrin, M.E.

Electrochemical Society
8 Conference Proceedings Normal Incidence Reflectance: A Robust Tool for In Situ Real-Time Measurement of Growth Rates and Optical Constants of CVD-Grown Semiconductor Thin Films

Breiland, W.G., Brennan, T.M., Chui, H.C., Hammons, B.E., Killeen, K.P.

Electrochemical Society
3 Conference Proceedings GAS-PHASE SILICON ATOM DENSITIES IN THE CHEMICAL VAPOR DEPOSITION OF SILICON FROM SILANE

Coltrin, Michael E., Breiland, William G., Ho, Pauline

MRS - Materials Research Society
9 Conference Proceedings DIRECT MEASUREMENT OF THE REACTIVITY OF NH AND OH ON A SILICON NITRIDE SURFACE

Buss, R. J., Ho, P., Fisher, E. R., Breiland, William G.

MRS - Materials Research Society
4 Conference Proceedings THEORETICAL MODELING AND LASER DIAGNOSTICS OF SILICON CHEMICAL VAPOR DEPOSITION

Coltrin, Michael. E., Breiland, William. G., Ho, Pauline

American Institute of Chemical Engineers
10 Conference Proceedings SPECTRAL REFLECTANCE AS AN IN SITU MONITOR FOR MOCVD

Breiland, W. G., Killeen, K. P.

MRS - Materials Research Society
5 Conference Proceedings Sources of the Parasitic Chemical Reactions during AlGaN OMPVE*

Creighton, J.R., Breiland, W.G., Coltrin, M.E.

Electrochemical Society
11 Conference Proceedings Photosensitizer quantitation in vivo by flourescence microsampling

Pogue,B.W., Burke,G.C., Lee,C.C., Hoopes,P.J.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings *LASER PROBES AND NUMERICAL MODELING AS PROCESS DIAGNOSTICS IN CHEMICAL VAPOR DEPOSITION

Breiland, William G., Ho, Pauline, Coltrin, Michael E,, Kee, Robert J., Evans, Greg H.

Materials Research Society
12 Conference Proceedings OPTICAL EMISSION SPECTROSCOPY, LASER INDUCED FLOURESCENCE, AND MASS SPECTROMETRY STUDIES OF SILANE, DISILANE, AND CHALOROSILANE PLASMAS

Lee, H.U., Ross, R.C., De Neufville, J.P.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12