BEAM-ASSISTED CVD OF MICROELECTRONIC FILMS
- Author(s):
Emery, K. A. Thompson, L. R. Bishop, D. Zarnani, H. Boyer, P. K. Moore, P. K. Rocca, J. J. Collins, G. J. - Publication title:
- Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 29
- Pub. Year:
- 1984
- Page(from):
- 81
- Page(to):
- 92
- Pages:
- 12
- Pub. info.:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444008947 [0444008942]
- Language:
- English
- Call no.:
- M23500/29
- Type:
- Conference Proceedings
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