LASER-INDUCED DEPOSITION OF SILICON FILMS AND CARS DIAGNOSTICS

LASER-INDUCED DEPOSITION OF SILICON FILMS AND CARS DIAGNOSTICS

Author(s):

Publication title:

Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

29

Pub. Year:

1984

Page(from):

21

Page(to):

28

Pages:

8

Pub. info.:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444008947 [0444008942]

Language:

English

Call no.:

M23500/29

Type:

Conference Proceedings

Details

TDL ID:	ZA00015513
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser-controlled chemical processing of surfaces
Conf. info. (Number):	1983
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1983.11.14-1983.11.16

Similar Items:

1 Conference Proceedings Reactive laser-sputtering for amorphous silicon films Hanabusa, M., Suzuki, M. North Holland	7 Conference Proceedings Laser-induced synthesis of InN in NH3 atmosphere:diagnostics of intermediates and InN thin film deposition Giardini-Guidoni,A., Di Palma,T.M., Marotta,V., Teghil,R., Cicala,G. SPIE-The International Society for Optical Engineering
2 Conference Proceedings IR LASER-INDUCED DEPOSITION OF SILICON THIN FILMS Gattuso, T. R., Meunier, M., Adler, D., Haggarty, J. S. North-Holland	8 Conference Proceedings SCANNING TUNNELING MICROSCOPIC STUDY OF THE GROWTH PROCESS IN PHOTOCHEHICAL VAPOR DEPOSITION OF ALUMINUM FILM Hanabusa, Mitsugu, Sahara, Kouji Materials Research Society
3 Conference Proceedings DEPOSITION OF a-Si FILMS USING SILANE MOLECULAR BEAMS EXCITED BY HEATED WIRE AND ArF LASER Hanabusa, M., Tsuboi, T., Sato, T., Furuno, S., Iguchi, S., Inoue, T. Materials Research Society	9 Conference Proceedings A MODEL FOR THE LASER-INDUCED CHEMICAL VAPOR DEPOSITION OF HYDROGENATED AMORPHOUS SILICON Meunier, M., Flint, J. H., Adler, D., Haggerty, J. S. North-Holland
4 Conference Proceedings Plasma diagnostics in KrF excimer laser deposition of Ti thin films Hong,M.H., Lu,Y.F., Ho,T.M., Lu,L.W., Low,T.S. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Deposition of Diamond-Like Carbon Films by Excimer Lasers Using Frozen Source Gases Hanabusa, Mitsugu, Tsujihara, Kiyohito, Zhengxin, Liu, Ishihara, Seiji, Uchida, Hironaga MRS - Materials Research Society
5 Conference Proceedings PHOTOCHEMICAL VAPOR DEPOSITION OF ALUMINUM THIN FILMS Hanabusa, M., Oikawa, A., Cai, P.Y., Furuno, S., Iguchi, S. Materials Research Society	11 Conference Proceedings Deposition of PZT thin films by pulsed laser ablation for MEMS application Maeda,R., Kikuchi,K.M., Schroth,A., Umezawa,A., Masumoto,S. SPIE-The International Society for Optical Engineering
6 Conference Proceedings WAVELENGTH-DEPENDENT AREA SELECTIVITY IN PHOTOCHEMICAL VAPOR DEPOSITION OF ALUMINUM FILMS Hanabusa, Mitsugu, Ikeda, Masashi Materials Research Society	12 Conference Proceedings X-Ray Investigation on Strength of Thin Films T. Hanabusa, M. Shinohara Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12