Blank Cover Image

MASKLESS PATTERNING OF Cr FILMS USING FOCUSED ION BEAMS

Author(s):
Publication title:
Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
27
Pub. Year:
1984
Page(from):
531
Page(to):
536
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008695 [0444008691]
Language:
English
Call no.:
M23500/27
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings MASKLESS ETCHING OF SiO2 BY ION BEAM ASSISTED ETCHING TECHNIQUE

Xu, Z., Gamo, K., Namba, S.

Materials Research Society
7 Conference Proceedings *LOW ENERGY FOCUSED ION BEAM PROCESSING

Gamo, Kenji

Materials Research Society
2 Conference Proceedings MASKLESS PATTERNING OF Mo AND Si BY FOCUES ION BEAM IMPLANTATION

Gamo, Kenji, Yonehara, Katsuyuki, Nagatomo, Shohei, Namba, Susumu

Materials Research Society
8 Conference Proceedings Dynamic behavior of nano second pulsed Nd:glass laser annealing in ion implanted silicon

Takai, M., Sato, Y., Murakami, K., Gamo, K., Minamisono, T., Namba, S.

North Holland
3 Conference Proceedings *RECENT ADVANCES IN THE APPLICATION OF FOCUSED ION BEAMS

Gamo, Kenji, Namba, Susumu

Materials Research Society
9 Conference Proceedings Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition (Invited Paper) [6376-01]

Matsui, S.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings MASKLESS FORMATION OF TUNGSTEN FILMS BY ION BEAM ASSISTED DEPOSITION TECHNIQUE

Xu, Zheng, Kosugi, Toshihiko, Gamo, Kenji, Namba, Susumu

Materials Research Society
10 Conference Proceedings SINGLE CRYSTALLINE GERMANIUM ISLAND ON SILICON DIOXIDE BY ZONE MELTING

Takai, M., Tanigawa, T., Gamo, K., Namba, S.

North-Holland
5 Conference Proceedings MULTILAYER ANALYSIS BY FOCUSED MeV ION BEAM

Takai, M., Kinomura, A., Izumi, M, Matsunaga, K., Inoue, K., Gamo, K., Satou, M., Namba, S.

Materials Research Society
11 Conference Proceedings MICRO-RBS ANALYSIS OF MASKLESSLY FABRICATED STRUCTURES

Kinomura, A., Takai, M., Matsuo, T., Satou, M., Kiuchi, M., Fujii, K., Namba, S.

Materials Research Society
6 Conference Proceedings CHEMICALLY-ENHANCED GaAS MASKLESS ETCHING USING A NOVEL FOCUSED ION BEAM ETCHING SYSTEM WITH A CHLORINE MOLECULAR AND RADICAL BEAM

Takado, N., Asakawa, K., Arimoto, H., Morita, T., Sugata, S., Miyauchi, E., Hashimoto, H.

Materials Research Society
12 Conference Proceedings Low-energy focused ion-beam system combined with molecular-beam epitaxy system for fabrication of 3D buried semiconductor structures

J. Yanagisawa, K. Kito, K. Monden, K. Gamo

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12