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CHARACTERIZATION OF N-TYPE LAYERS FORMED IN Si BY ION IMPLANTATION OF HYDROGEN

Author(s):
Wilson, S. R.
Paulson, W. M.
Krolikowski, W. F.
Fathy, D.
Gressett, J. D.
Hamdi, A. H.
McDaniel, F. D.
2 more
Publication title:
Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
27
Pub. date:
1984
Page(from):
287
Page(to):
292
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008695 [0444008691]
Language:
English
Call no.:
M23500/27
Type:
Conference Proceedings

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