Blank Cover Image

CHARACTERIZATION OF DEVICE GRADE SOI STRUCTURES FORMED BY IMPLANTATION OF HIGH DOSES OXYGEN

Author(s):
Hemment, P. L. F.
Maydell-Ondrusz, E. A.
Stephens, K. G.
Arrowsmith, R. P.
Glaccum, A> C.
Kilner, J. A.
Butcher, J. B.
2 more
Publication title:
Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
27
Pub. Year:
1984
Page(from):
281
Page(to):
286
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008695 [0444008691]
Language:
English
Call no.:
M23500/27
Type:
Conference Proceedings

Similar Items:

Celler, G.K., Hemment, P.L.F., West, K.W., Gibson, J.M.

Materials Research Society

Udrea, F., Milne, W.I., Hemment, P.L.F.

Electrochemical Society

Maydell-Ondrusz, E. A., Harper, R. E., Abid, A., Hemment, P. L. F., Stephens, K. G.

North-Holland

Meekison, C. D., Booker, G. R., Reeson, K. J., Hemment, P. L. F., Celler, G. K.

Materials Research Society

Kerger, M.B., Kwor, R., Zeller, M., Hemment, P.L.F., Reeson, K.J.

Materials Research Society

Harper, R. E., Maydell-Ondrusz, E. A., Wilson, I. H., Stephens, K. G.

North-Holland

Hemment, P. L. F.

North Holland

Hatzopoulos, N., Siapkas, D.I., Hemment, P.L.F., Skorupa, W.

Electrochemical Society

Pinizzotto, R. F., Vaandrager, B. L., Lam, H. W.

North-Holland

Batstone, J.L., White, Alice E., Short, K..T., Gibson, J.M., Jacobson, D.C.

Materials Research Society

El-Ghor, M.K., Pennycook, S.J., Sjoreen, T.P., Narayan, J.

Materials Research Society

HOBBS,A., BARKLIE,R.C., REESON,K., HEMMENT,P.L.F.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12