Blank Cover Image

A REVIEW OF SILICON-ON-INSULATOR FORMATION BY OXYGEN ION IMPLANTATION*

Author(s):
Pinizzitto, R. F.  
Publication title:
Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
27
Pub. Year:
1984
Page(from):
265
Page(to):
274
Pages:
10
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008695 [0444008691]
Language:
English
Call no.:
M23500/27
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings HIGH DOSE RATE OXYGEN IMPLANTATION FOR FORMATION OF SILICON-ON-INSULATOR STRUCTURES

Cortesi, E., Namavar, F., Pinizzotto, R.F., Yang, H.

Materials Research Society
7 Conference Proceedings ION-IMPLANTED OXYGEN ISOTOPES IN SILICON.

STEIN,R.C.

Trans Tech Publications
2 Conference Proceedings THE MICROSTRUCTURE OF SILICON-ON-INSULATOR STRUCTURES FORMED BY HIGH DOSE OXYGEN ION IMPLANTATION

Pinizzotto, R. F., Vaandrager, B. L., Lam, H. W.

North-Holland
8 Conference Proceedings AN INVESTIGATION OF BURIED LAYER FORMATION BY 40keV OXYGEN IMPLANTATION INTO SILICON

Li, Y., Kilner, A., Chater, R. J., Tate, T. J., Hemment, P. L. F., Nejim, A.

Materials Research Society
3 Conference Proceedings FORMATION OF SILICON-ION-INSULATOR STRUCTURES BY MULTIPLE OXYGEN IMPLANTATIONS

Bunker, S. N., Sioshansi, P., Tobin, S. P.

Materials Research Society
9 Conference Proceedings Photoluminescence of Extended Defects in Silicon-on-Insulator Formed by Implantation of Oxygen

Qian, Y. H., Evans, J. H., Giles, L. F., Nejim, A., Hemment, P. L. F.

MRS - Materials Research Society
4 Conference Proceedings *PRECIPITATE AND DEFECT FORMATION IN OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL

Krause, S. J., Jung, C. O., Ravi, T. S., Wilson, S. R., Burke, D. E.

Materials Research Society
10 Conference Proceedings Fluence Dependence of the Formation of Open-Volume Defects in Silicon After Ion Implantation

Eichler,S., Borner,F., Gebauer,J., Krause-Rehberg,R.

Trans Tech Publications
5 Conference Proceedings FORMATION OF SILICON ON INSULATOR (SOI) WITH SEPARATION BY PLASMA IMPLANTATION OF OXYGEN (SPIMOX)

Liu, J. B., Iyer, S. S. K., Min, J., Chu, P., Gronsky, R., Hu, C., Cheung, N. W.

MRS - Materials Research Society
11 Conference Proceedings DEFECT PAIR FORMATION BY IMPLANTATION-INDUCED STRESSES IN HIGH-DOSE OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL

Lee, J. D., Park, J. C., Venables, D., Krause, S. J., Roitman, P.

MRS - Materials Research Society
6 Conference Proceedings * SILICON ON INSULATOR FORMED BY 0+ OR N+ ION IMPLANTATION

Hemment, P.L.F.

Materials Research Society
12 Conference Proceedings FORMATION OF BURIED OXIDE IN MEV OXYGEN IMPLANTED SILICON

Nieh, C. W., Xiong, F., Ahn, C. C., Zhou, Z., Jamieson, D. N., Vreeland Jr., T., Fultz, B., Tombrello, T. A.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12