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Si contacts formed from spun-on metallo-organic solutions

Author(s):
Pai, C. S.
Zhang, B.
Scott, D. M.
Lau, S. S.
Bartur, M.
Tseng, W. F.
1 more
Publication title:
Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
25
Pub. Year:
1984
Page(from):
639
Page(to):
644
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009050 [0444009051]
Language:
English
Call no.:
M23500/25
Type:
Conference Proceedings

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