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Interaction of Al films on single crystal Si substrates induced by ion irradiation and post-anneal

Author(s):
Publication title:
Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
25
Pub. Year:
1984
Page(from):
253
Page(to):
260
Pages:
8
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009050 [0444009051]
Language:
English
Call no.:
M23500/25
Type:
Conference Proceedings

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SPIE - The International Society of Optical Engineering
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