Effect of nitrogen and oxygen impurities on tantalum silicide formation
- Author(s):
- Publication title:
- Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 25
- Pub. Year:
- 1984
- Page(from):
- 123
- Page(to):
- 130
- Pages:
- 8
- Pub. info.:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444009050 [0444009051]
- Language:
- English
- Call no.:
- M23500/25
- Type:
- Conference Proceedings
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