Blank Cover Image

Effect of nitrogen and oxygen impurities on tantalum silicide formation

Author(s):
Publication title:
Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
25
Pub. Year:
1984
Page(from):
123
Page(to):
130
Pages:
8
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009050 [0444009051]
Language:
English
Call no.:
M23500/25
Type:
Conference Proceedings

Similar Items:

Lien, C-D., Nicolet,M-A.

North-Holland

7 Conference Proceedings *OXIDATION OF SILICIDES-SUMMARY

Nicolet, M.-A

Materials Research Society

Ho, K. T., Nicolet, M.-A., Wielu-ski, L.

North-Holland

Hewett, C. A., Suni, I., Lau, S. S., Hung, L. S., Scott, D. M.

North-Holland

Lien, C.-D., Wielu-ski, L., Nicolet, M.-A., Stika, K. M

North-Holland

Rej, D. J., Gavrilov, N. V., Emlin, D., Henins, I., Kern, K., Kurennykh, T., Mizgulin, V. N., Munson, C. P., Nastasi, …

MRS - Materials Research Society

Wielunski, L. S., Lien, C-D., Liu, B.-X., Nicolet, M. -A.

North-Holland

Bentini, G. G., Berti, M., Cohen, C., Drigo, A. V., Guerri, S., Nipoti, R., Siejka, J.

North-Holland

Lien, C. D., Bartur, M., Nicolet, M.-A.

North-Holland

Magini,M., Colella,C., Guo,W., Makris,T.Dikonimos, Turtt,S.

Trans Tech Publications

Mangelinck, D., Dai, J. Y., Lahiri, S. K., Ho, C. S., Osipowicz, T.

MRS - Materials Research Society

Ho,C.S., Pey,K.L., Wong,H., Karunasiri,R.P.G., Chua,S.J., Lee,K.H., Tang,Y., Wong,S.M., Chan,L.H.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12