Blank Cover Image

DEFECT REDUCTION BY TILTED ZONE CRYSTALLIZATION OF PATTERNED SILICON FILMS ON FUSED SILICA

Author(s):
Publication title:
Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
23
Pub. Year:
1984
Page(from):
403
Page(to):
408
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009036 [0444009035]
Language:
English
Call no.:
M23500/23
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings THIN-FILM TRANSISTORS IN CO2-LASER CRYSTALLIZED SILICON FILMS ON FUSED SILICA

Johnson, N., M., Tuan, H. C., Moyer, M. D., Thompson, D. K., Biegelsen, D. K., Fennell, L. E., Chiang, A.

North-Holland
7 Conference Proceedings Processing and properties of CW laser-recrystallized silicon films on amorphous substrates

Johnson, N.M., Biegelsen, D.K., Moyer, M.D.

North Holland
2 Conference Proceedings *LASER-INDUCED CRYSTALLIZATION OF SILICON ON BULK AMORPHOUS SUBSTRATES: AN OVERVIEW

Biegelsen, D. K., Johnson, S. T., Hawkins, W. G., Fennell, L. E., Moyer, M. D.

North-Holland
8 Conference Proceedings Laser induced crystal growth of silicon islands on amorphous substrates

Biegelsen, D.K., Johnson, N.M., Bartelink, D.J., Moyer, M.D.

North Holland
3 Conference Proceedings *DETECTION OF ELECTRONIC DEFECTS IN STRIP-HEATER CRYSTALLIZED SILICON THIN FILMS

Johnson, N. M., Moyer, M. D., Fennell, L. E., Maby, E. W., Atwater, H.

North-Holland
9 Conference Proceedings NMOS DYNAMIC SHIFT REGISTERS IN CO2 LASER-CRYSTALLIZED SILICON THIN-FILMS ON FUSED QUARTZ

Chiang, A., Zarzycki, M> H., Meuli, W. P., Johnson, N. M.

North Holland
4 Conference Proceedings Correlated electrical and microstructural studies of recrystallized silicon thin films on bulk glass substrates

Biegelsen, D.K., Johnson, N.M., Nemanich, R.J., Moyer, M.D., Fennell, L.E.

North Holland
10 Conference Proceedings PHOTOCONDUCTION IN THIN-FILM TRANSISTORS FABRICATED FROM LASER-CRYSTALLIZED SILICON ON FUSED QUARTZ

Chiang, A., Zarzycki, M.H., Johnson, N.M.

Materials Research Society
5 Conference Proceedings ELECTRONIC DEEP LEVELS IN LASER-CRYSTALLIZED SILICON THIN- FILM MOS CAPACITORS ON FUSED SILICA

Johnson, N. M., Moyer, M. D.

North Holland
11 Conference Proceedings *DEFECTS IN AMORPHOUS SILICON,

Biegelsen, D.

North-Holland
6 Conference Proceedings Grain boundaries in crystallized silicon thin films

Johnson, N.M., Biegelsen, D.K., Moyer, M.D.

North-Holland
12 Conference Proceedings Electronic defects in beam - crystallized silicon

Johnson, N.M.

North Holland
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12