Blank Cover Image

GERMANIUM IMPLANTATION INTO SILICON: AN ALTERNATE PRE-AMORPHIZATION/RAPID THERMAL ANNEALING PROCEDURE FOR SHALLOW JUNCTION TECHNOLOGY

Author(s):
Publication title:
Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
23
Pub. date:
1984
Page(from):
303
Page(to):
308
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009036 [0444009035]
Language:
English
Call no.:
M23500/23
Type:
Conference Proceedings

Similar Items:

Maszara, W., Carter, C., Sadana, D. K., Liu, J., Ozguz, V., Wortman, J., Rozgonyi, G. A.

North-Holland

de Souza, J. P., Sadana, D. K.

Materials Research Society

Sadana, D. K.

Materials Research Society

Myers, E., Rozgonyi, G.A., Sadana, D.K., Maszara, W., Wortman, J.J., Narayan, J.

Materials Research Society

Souza, J. P. de, Fichtner, P. F. P., Sadana, D. K.

MRS - Materials Research Society

Brotherton, S. D., Ayres, J. R., Clegg, J. B., Goldsmith, B. J.

Materials Research Society

Calder, I. D., Naguib, H. M., Houghton, D.

Materials Research Society

Rozgonyi, G. A., Sadana, D. K.

American Chemical Society

El-Ghor, M. K., Pennycook, S. J., Zuhurm R. A.

Materials Research Society

Agarwal, A., Gossmann, H-J., Fiory, A. T.

MRS - Materials Research Society

Agarwal, A., Gossmann, H.-J.L., Fiory, A.T., Venezia, V.C., Jacobson, D.C.

Electrochemical Society

Maszara, W., Sadana, D. K., Rozgonyi, G. A., Sands, T., Washburn, J., Wortman, J. J.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12