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INFLUENCE OF RAPID THERMAL ANNEALING OF SHALLOW BF2 IMPLATATION INTO PRE-AMORPHIZED SILICON

Author(s):
Maszara, W.
Carter, C.
Sadana, D. K.
Liu, J.
Ozguz, V.
Wortman, J.
Rozgonyi, G. A.
2 more
Publication title:
Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
23
Pub. Year:
1984
Page(from):
285
Page(to):
292
Pages:
8
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444009036 [0444009035]
Language:
English
Call no.:
M23500/23
Type:
Conference Proceedings

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