IR LASER-INDUCED DEPOSITION OF SILICON THIN FILMS

IR LASER-INDUCED DEPOSITION OF SILICON THIN FILMS

Author(s):

Publication title:

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

17

Pub. Year:

1983

Page(from):

215

Page(to):

224

Pages:

10

Pub. info.:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444007827 [0444007822]

Language:

English

Call no.:

M23500/17

Type:

Conference Proceedings

Details

TDL ID:	ZA00015500
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser diagnostics and photochemical processing for semiconductor devices
Conf. info. (Number):	1982
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1982.11.00

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