LASER-INDUCED FLUORESCENCE DIAGNOSTICS OF CF4/O2/H2 PLASMA ETCHING

LASER-INDUCED FLUORESCENCE DIAGNOSTICS OF CF4/O2/H2 PLASMA ETCHING

Author(s):

Publication title:

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

17

Pub. Year:

1983

Page(from):

161

Page(to):

168

Pages:

8

Pub. info.:

New York: North-Holland

ISSN:

02729172

ISBN:

9780444007827 [0444007822]

Language:

English

Call no.:

M23500/17

Type:

Conference Proceedings

Details

TDL ID:	ZA00015500
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser diagnostics and photochemical processing for semiconductor devices
Conf. info. (Number):	1982
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1982.11.00

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