*LASER CHEMICAL ETCHING OF CONDUCTING AND SEMICONDUCTING MATERIALS

*LASER CHEMICAL ETCHING OF CONDUCTING AND SEMICONDUCTING MATERIALS

Author(s):: Chuang, T. J.
Publication title:: Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 17
Pub. Year:: 1983
Page(from):: 45
Page(to):: 56
Pages:: 12
Pub. info.:: New York: North-Holland
ISSN:: 02729172
ISBN:: 9780444007827 [0444007822]
Language:: English
Call no.:: M23500/17
Type:: Conference Proceedings

Details

TDL ID:	ZA00015500
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser diagnostics and photochemical processing for semiconductor devices
Conf. info. (Number):	1982
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1982.11.00

Similar Items:

1 Conference Proceedings LASER-INDUCED CHEMICAL ETCHING OF SOLIDS: PROMISES AND CHALLENGES Chuang, T. J. North-Holland	7 Conference Proceedings LASER-ASSISTED SELECTIVE CHEMICAL ETCHING OF GaAS/A1GaAs LAYERED STRUCTURES Brown, R.T., Black, J.F., Sacks, R.N., Peterson, G.G., Leonberger, F.J. Materials Research Society
2 Conference Proceedings INFRARED LASER PHOTODESORPTION OF ADSORBED PHASES Hussla, I., Chuang, T. J. North-Holland	8 Conference Proceedings Backside sample preparation with laser-enhanced chemical etching for infrared photon imaging Deng, Q., Mai, Z., He, R., Tao, T., Lam, J., Lu, Y.F. SPIE - The International Society of Optical Engineering
3 Conference Proceedings GAS-SURFACE INTERACTIONS STIMULATED BY LASER RADIATION: BASES AND APPLICATIONS Chuang J. T. Martinus Nijhoff Publishers	9 Conference Proceedings Physical and Chemical Aspects of Laser-Materials Interactions J.T. Dickinson Springer
4 Conference Proceedings LASER CHEMICAL ETCHING OF METALS IN NEUTRAL SALT SOLUTIONS Datta, M., Romankiw, L. T., Vigliotti, D. R., von Gutfeld, R. J. Materials Research Society	10 Conference Proceedings Observation of Dislocation Etch Pits in Epitaxial Lateral Overgrowth GaN by Wet Chemical Etching Wen, T. C, Lee, S.C., Chuang, H. S., Chiou, C. H., Lee, W. I. Materials Research Society
5 Conference Proceedings Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials Kautek,W., Kruger,J. Trans Tech Publications	11 Conference Proceedings Conducting Polymer-Based Sensory Materials Swager M. T., Marsella J. M., Newland J. R., Zhou Q. Society of Plastics Engineers, Inc. (SPE)
6 Conference Proceedings Laser chemical etching of copper films A. Aliouchouche, J. Boulmer, D. Débarre, B. Bourguignon, J.-P. Budin Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings CHEMICAL AND STRUCTURAL EFFECTS ON DIAMOND C(111)-(2X1) SURFACE EXPOSED TO F, H AND HYDROCARBON SPECIES Yamada, Taro, Chuang, T.J., Seki, H. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12