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Si-ON-SAPPHIRE AND Si IMPLANTED WITH Zr IONS: LATTICE LOCATION, SOLID PHASE EPITAXIAL REGROWTH AND ELECTRICAL PROPERTIES

Author(s):
  • Golecki, I. ( Rockwell International, Anaheim, CA: )
  • Suni, I, ( California Institute of Technology, Pasadena, CA )
Publication title:
Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
14
Pub. date:
1983
Page(from):
541
Page(to):
546
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008121 [0444008128]
Language:
English
Call no.:
M23500/14
Type:
Conference Proceedings

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