Blank Cover Image

A COMPARISON OF ELLIPSOMETER AND RBS ANALYSIS OF IMPLANT DAMAGE IN SILICON

Author(s):
Publication title:
Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
14
Pub. date:
1983
Page(from):
523
Page(to):
528
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008121 [0444008128]
Language:
English
Call no.:
M23500/14
Type:
Conference Proceedings

Similar Items:

Wilson, S.R., Paulson, W.M., Tam, G., Gregory, R.B., White, C.W., Appleton, B.R.

North Holland

McHargue J. C., Appleton R. B., White W. C.

Martinus Nijhoff Publishers

Gavaler, J. R., Braginski, A. I., Manocha, A. S., Appleton, B. R., White, C. W., Williams, J. M.

North-Holland

White, C.W., Appleton, B.R., Stritzker, B., Zehner, D.M., Wilson, S.R.

North Holland

Krause, S. J., Wilson, S. R., Paulson, W. M., Gregory, R. B.

Materials Research Society

Farlow, G. C., White, C. W., Appleton, B. R., Skland, P. S., McHargue, C. J.

Materials Research Society

Wilson, S. R., Gregory, R. B., Paulson, W. M., Handi, A. H., McDaniel, F. D.

North-Holland

White, C.W., Naramoto, H., Williams, J.M., Narayan, J., Appleton, B.R., Wilson, S.R.

North Holland

White, C. W., Zehner, D. M., Narayan, J., Holland,. O, W.,, Appleton, B. R., Wilson, S. R.

North-Holland

McHargue, C. J., Naramoto, H., Appleton, B. R., White, C. W., Williams, J. M.

North-Holland

Holland,. O, W.,, Narayan, J., White, C. W., Appleton, B. R.

North-Holland

Wilson, S. R., Paulson, W. M., Varker, C. J., Lowe, A., Gregory, R. B., Reuss, R. H., Wu, S. Y., Whitfield, J. D.

North-Holland

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12