Blank Cover Image

THE EFFECT OF OXYGEN IN COSPUTTERED (TITANIUM + SILICON ) FILMS

Author(s):
  • Beyers, R.
  • Sinclair, R. ( Department of Materials Science and Engineering Stanford University, Stanford,. CA; )
  • Thomas, M. E. ( Fairchild Camera and Instrument Corporation, Palo Alto, CA )
Publication title:
Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
14
Pub. Year:
1983
Page(from):
423
Page(to):
428
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008121 [0444008128]
Language:
English
Call no.:
M23500/14
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings TEM studies of cosputtered TiSi2 films containing excess silicon

Beyers, R., Sinclair, R., Thomas, M. E.

North-Holland
7 Conference Proceedings Cosputtering effect in titanium oxides by ion-beam sputtering deposition

Hsu,J.-C., Lee,C.-C., Hwa,L.-G.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings THE PHASE FORMATION SEQUENCE IN TITANIUM-SILICON THIN FILMS

Beyers, R., Sinclair, R.

Materials Research Society
8 Conference Proceedings Optical properties of cosputtered copper-aluminium films

Sathiaraj, T. S., Kumar, S., DevanK, R. S.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings EVIDENCE FOR A GRAIN BOUNDARY GROOVING MODEL OF AGGLOMERATION IN POLYCRYSTALLINE TiSi2 THIN FILMS

Nolan, Thomas, Beyers, Robert, Sinclair, Robert

Materials Research Society
9 Conference Proceedings TRANSMISSION ELECTRON MICROSCOPY OF MOCVD TITANIUM NITRIDE FILMS

Itoh, Toshio, Konno, Toyohiko J., Sinclair, Robert, Raaijmakers, Ivo J. M. M., Roberts, Bruce E.

MRS - Materials Research Society
4 Conference Proceedings High Dielectric Constant Hf-Ti-Sn-O Off-Axis Cosputtered Films

Schneemeyer, L. F., Dover, R. B. van, Fleming, R. M.

MRS - Materials Research Society
10 Conference Proceedings REACTIONS AT THE TITANIUM-SILICON INTERFACE STUDIED USING HOT-STAGE TEM

Kirtikar, Amol, Sinclair, Robert

Materials Research Society
5 Conference Proceedings INTERFACIAL REACTIONS IN TITANIUM-SILICON MULTILAYERS

Holloway, Karen, Sinclair, Robert

Materials Research Society
11 Conference Proceedings Microstructure Characterization of Hydrogenated Amorphous Silicon Films by Rare Gas Effusion Studies

Beyer, Wolfhard

Materials Research Society
6 Conference Proceedings Growth and Characterization of FePt Compound Thin Films

Visokay, M. R., Sinclair, R.

MRS - Materials Research Society
12 Conference Proceedings EFFECT OF INTERLAYERS UPON TEXTURE AND MAGNETIC PROPERTIES IN Co ALLOY MULTILAYER FILMS FOR LONGITUDINAL MAGNETIC RECORDING

Visokay, M. R., Kuwabara, M., Saffari, H., Hayashi, H., Sinclair, R., Onishi, Y.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12