Blank Cover Image

THERMAL DONOR FORMATION BY THE AGGLOMERATION OF OXYGEN IN SILICON

Author(s):
  • Gosele, U. ( Max-Planck Institute of Metal Physics, Stuttgart, West Germany; )
  • Tan,. T. Y. ( IBM, Thomas J. Watson Research Center, Yorktown Heights., NY )
Publication title:
Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
14
Pub. Year:
1983
Page(from):
153
Page(to):
158
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444008121 [0444008128]
Language:
English
Call no.:
M23500/14
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ON THE QUESTION OF OXYGEN DIFFUSION DURING OXYGEN RELATED THERMAL DONOR FORMATION IN SILICON

Oehrlein, G.S., Tan, T.Y., Kleinhenz, R.L., Lindstrom, J.L.

Materials Research Society
7 Conference Proceedings Phosphorus and Aluminum Gettering of Gold in Silicon: Simulation and Optimization Considerations

Gafiteanu, R., Gosele, U., Tan, T. Y.

MRS - Materials Research Society
2 Conference Proceedings ON THE KINETICS OF OXYGEN CLUSTERING AND THERMAL DONOR FORMATION IN CZOCHRALSKI SILICON

Tan, T.Y., Kleinhenz R., Schneider C.P.

Materials Research Society
8 Conference Proceedings Formation of oxygen-related donors during transition from thermal donors to new donors in CZ-silicon

Singh,S., Prakash,O.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings ENHANCED OXYGEN DIFFUSION IN SILICON AT THERMAL DONOR FORMATION TEMPERATURE.

LEE,S.-T., FFLLINGER,P.

Trans Tech Publications
9 Conference Proceedings Nucleation and Growth of Voids in Silicon

Plekhanov, P. S., Gosele, U. M., Tan, T. Y.

MRS - Materials Research Society
4 Conference Proceedings OXYGEN ENDOR OF THERMAL DONORS IN SILICON.

WEZEP,D.A.VAN, GREGORKIEWICZ,T., BEKMAN,H.H.P.Th., AMMERLAAN,C.A.J.

Trans Tech Publications
10 Conference Proceedings The Roie of Nitrogen in the Formation of Oxygen-Related Thermal Donors in Silicon

Gnffin,J.A., Hartung,J., Weber,J.

Trans Tech Publications
5 Conference Proceedings FORMATION KINETICS OF THERMAL DONORS IN SILICON

Borenstien, Jeffrey T., Peak, David, Corbett, James W.

Materials Research Society
11 Conference Proceedings Thermal Donor Formation and Mechanism of Enhanced Oxygen Diffusion in Silicon

Markevich,V.P., Makarenko,L.F., Murin,L.L.

Trans Tech Publications
6 Conference Proceedings Influence of Rapid Thermal Annealing on Thermal Donor Formation and Oxygen Precipitation in Czochralski Silicon

Takeno, H., Aihara, K., Hayamizu, Y., Masui, T., Suezawa, M.

Electrochemical Society
12 Conference Proceedings Analysis of Oxygen Thermal Donor Formation in n-type Cz-Silicon

Rafi, J.M., Simoen, E., Claeys, C., Ulyashin, A., Job, R., Fahrner, W., Versluys, J., Clauws, P., Lozano, M., …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12