Blank Cover Image

RAPID ISOTHERMAL ANNEALING OF Si IMPLANTED SEMI-INSULATING GaAs BY MEANS OF HIGH PREQUENCY INDUCTION HEATING

Author(s):
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
641
Page(to):
646
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Multiple scanned electron beam annealing of Si implanted GaAs

Bujatti, M., Cetronio, A., Nipoti, R., Olzi, E.

North Holland
7 Conference Proceedings CHARACTERIZATION OF ION IMPLANTED ZnSe/GaAs UPON RAPID THERMAL ANNEALING

Lowen, P. D., Jones, K. S., Ochoa, R., Simmons, J., Wang, Y. H., Park, R. M., Wilson, R.

Materials Research Society
2 Conference Proceedings ACTIVATION UNIFORMITY DEPENDENCE OF UNDOPED SEMI-INSULATING GaAs ON POST-IMPLANT ANNEALING CONDITIONS

Lanzieri, C., Graffitti, R., Cetronio, A.

Materials Research Society
8 Conference Proceedings RAPID THERMAL ANNEALING OF Si-IMPLANTED GaAs

Rosenblatt, D. H., Hitchens, W. R., Shatas, S., Gat, A., Betts, D. A.

North-Holland
3 Technical Paper ACTIVATION UNIFORMITY DEPENDENCE OF UNDOPED SEMI-INSULATING GaAs ON POST-IMPLANT ANNEALING CONDITIONS

LANZIERI, C., GRAFFITTI, R., CETRONIO, A.

National Aeronautics and Space Adminstration
9 Conference Proceedings High Temperature Annealing in High Energy 120Sn Implanted GaAs

Yousuf Pyar Ali, Narsale,A.M., Arora,B.M., Lokhre,S.G., Salvi,V.P., Kanjilal,D., Mehta,G.K.

Narosa Publishing House
4 Conference Proceedings DAMAGE REMOVAL AND ACTIVAITON IN RAPID-THERMALLY-ANNEALED SILICON IMPLANTED SEMI-INSULATING GaAs

Tandon, J.L., Madok, J.H., Leybovich, I.S., Bai, G.

Materials Research Society
10 Conference Proceedings POINT DEFECT EVOLUTION DURING RAPID THERMAL ANNEALING OF Si+-IMPLANTED GaAs

Levinson,. M, Armeinto, C. A., Shah, S. S. P.

Materials Research Society
5 Conference Proceedings Raman Study On H+Implanted Semi-Insulating GaAs

Santhakumar, K., Jayavel, P., Kesavamoorthy, R., Magudapathy, P., Nair, K.G.M., Ravichandran, V.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings DAMAGE REMOVAL PROCESSES IN ION IMPLANTED, RAPIDLY ANNEALED GaAs

Jacobson, D.C., Pearton, S.J., Hull, R., Poate, J.M., Williams, J.S.

Materials Research Society
6 Conference Proceedings EFFECTS OF RAPID THERMAL ANNEALS ON BORON IMPLANTED GaAs

Bowman Jr., R. C., Adams, P. M., Herman, M. H., Buttrill Jr., S. E.

Materials Research Society
12 Conference Proceedings HEATING RATE EFFECTS IN RAPID THERMAL ANNEALING OF ARSENIC IMPLANTED SILICON

Souza, J. P. de, Fichtner, P. F. P., Sadana, D. K.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12