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THIN-FILM TRANSISTORS IN CO2-LASER CRYSTALLIZED SILICON FILMS ON FUSED SILICA

Author(s):
Johnson, N., M.
Tuan, H. C.
Moyer, M. D.
Thompson, D. K.
Biegelsen, D. K.
Fennell, L. E.
Chiang, A.
2 more
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
605
Page(to):
612
Pages:
8
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

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