Blank Cover Image

LATERAL EPITAXIAL GROWTH OF THICK POLYSILICON FILMS ON OXIDIZED 3-INCH WAFERS

Author(s):
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
575
Page(to):
580
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

Similar Items:

Baumgart, H., Celler, G. K., Lischner, D. J., Robinson, McD., Sheng, T. T.

North-Holland

Li, Q., Fenner, D.B., Johansson, M.E., Hamblen, D.G., Hamblen, W.D., Lynds, L., Karrai, K., Liu, S., Dunmore, F., Drew, …

Materials Research Society

Robinson, McD., Celler, G. K., Lischner, D. J.

North Holland

Chandra,K., Zorman,C.A., Mehregany,M.

Trans Tech Publications

Park, K. -H., Jin, H. -S., Luo, L., Gibson, W. M., Wang, G. -C., Lu, T. -M.

Materials Research Society

Davis, R. F., Nam, O-H., Zheleva, T. S., Bremser, M. D., Linthicum, K. J., Gehrke, T., Rajagopal, P., Thomson, D. B., …

MRS - Materials Research Society

Davis, R. F., Nam, O. -H., Zheleva, T. S., Gehrke, T., Linthicum, K. J., Rajagopal, P.

Trans Tech Publications

Saddow, S. E., Carter, G., Geil, B., Zheleva, T., Melnychuck, G., Okhuysen, M. E., Mazzola, M. S., Vispute, R. D., …

Trans Tech Publications

K. Masumoto, K. Kojima, H. Okumura

Trans Tech Publications

Takahashi, K. S., Jaccard, D., Shibuya, K., Ohnishi, T., Lippmaa, M., Triscone, J. -M.

SPIE - The International Society of Optical Engineering

Fork, D.K., Geballe, T.H., Char, K., Laderman, S.S., Taber, R., Bridges, F., Ponce, F., Boyce, J.B., Connell, G.A.N.

Materials Research Society

Celler, G. K., Jackson, K. A., Trimble, L. E., Robinson, McD., Lischner, D. J.

North-Holland

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12