Blank Cover Image

PROCESSING OF SHALLOW (Rp < 150 A > IMPLANTED LAYERS WITH ELECTRON BEAMS

Author(s):
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
437
Page(to):
442
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ANNEALING AND DIFFUSION OF BORON IN SELF-IMPLANTED SILICON BY FURNACE AND ELECTRON BEAM HEATING

Godfrey, D. J., McMahon, R. A., Hasko, D. G., Ahmed, H., Dowsett, M. G.

Materials Research Society
7 Conference Proceedings CHARACTERISTICS OF RECRYSTALLIZED POLYSILICON ON SiO2 PRODUCED BY DUAL ELECTRON BEAM PROCESSING

Davis, J. R., McMahon, R. A., Ahmed, H.

North-Holland
2 Conference Proceedings ELECTRON BEAM ANNEALING OF SHALLOW BF2 IMPLANTATIONS

Jaussaud, C., Cartier, A. M., Escaron, J.

North-Holland
8 Conference Proceedings C-V and capacitance transient analysis of self-implanted amorphous Si layer regrown by swept-line electron beam (SLEB) annealing

Soda, K.J., DeJule, R.Y., Streetman, B.G.

North Holland
3 Conference Proceedings Evaluation of electron-beam stabilization for ion implant processing

Buffat, S. J., Kickel, B., Philipps, B., Adams, J., Ross, M. F., Minter, J. P., Marlowe, T., Wong, S. S.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings ION-BEAM PROCESSING OF ION-IMPLANTED Si

Dietrich, H. B., Corazzi, R. J., Tseng, W. F.

North-Holland
4 Conference Proceedings *ELECTRON BEAM PROCESSING OF SEMICONDUCTOS

Ahmed, H., McMahon, R. A.

North-Holland
10 Conference Proceedings Hot-Electron Phototransistors In Hydrogenated Amorphous Silicon

Gerstner, E. G., Shannon, J. M.

Materials Research Society
5 Conference Proceedings ELECTRON-BEAM ANNEALING OF PHOSPHORUS IMPLANTED CADMIUM TELLURIDE

Yang, C. B., Peng, M. L., Lue, J. T., Hwang, H. L.

Materials Research Society
11 Conference Proceedings SOFT VACUUM, PULSED ELECTRON BEAM PROCESSING OF POLYMIDES

Krishnaswamy, J., Li, L., Collins, G. J., Hiraoka, H., Caolo, M. A.

Materials Research Society
6 Conference Proceedings Dual electron beam processing system for semiconductor materials

McMahon, R.A., Davis, J.R., Ahmed, H.

North Holland
12 Conference Proceedings Application of electron-beam-induced processes to mask repair

Edinger, K., Boegli, V.A., Budach, M., Hoinkis, O., Weyrauch, B., Koops, H.W.P., Bihr, J., Greiser, J.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12