Blank Cover Image

SCANNING ELECTRON BEAM ANNEALING OF OXYGEN DONORS IN CZOCHRALSKI SILICON

Author(s):
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
413
Page(to):
418
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

Similar Items:

Pollard, C.J., Glaccum, A.E., Seight, J.D.

North Holland

Ulyashin, A. G., Bumay, Yu. A., Fahrner, W. R., Ivanov, A. I., Job, R., Palmetshofer, L.

MRS - Materials Research Society

Pollar, C. J., Barraclough, K. G., Skolnick, M. S.

Materials Research Society

McQuaid, S. A., Johnson, B. K., Gambaro, D., Falster, R., Ashwin, M., Newman, R. C.

MRS - Materials Research Society

3 Conference Proceedings Scanned e-beam annealing of MOS devices

Speight, J.D., Glaccum, A.E., Machin, D., McMahon, R.A., Ahmed, H.

North Holland

WEZEP,D.A.VAN, GREGORKIEWICZ,T., BEKMAN,H.H.P.Th., AMMERLAAN,C.A.J.

Trans Tech Publications

Hallberg,T., Lindstrom,J.L., Svensson,B.G., Swiatek,K.

Trans Tech Publications

Tan, T.Y., Kleinhenz R., Schneider C.P.

Materials Research Society

Yang, D., Li, H., Yu, X., Ma, X., Tian, D., Li, L., Qua, S.

Electrochemical Society

Godfrey, D. J., McMahon, R. A., Hasko, D. G., Ahmed, H., Dowsett, M. G.

Materials Research Society

Takeno, H., Aihara, K., Hayamizu, Y., Masui, T., Suezawa, M.

Electrochemical Society

Hart, Michael J., Evans, Alan G. R., Amaratunga, Gehan A. J.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12