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EFFECT OF PULSE DURATION ON THE ANNEALING OF ION IMPLANTED SILICON WITH A XeC1 EXCIMER LASER AND SOLAR CELLS

Author(s):
Young, R. T.
Narayan, J.
Christie, W. H.
van der Leeden, G. A.
Rothe, D. E.
Sandstro, R. L.
1 more
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
401
Page(to):
406
Pages:
6
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

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