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APPLICATIONS OF A CONTINUOUS WAVE INCOHERENT LIGHT SOUCE (CWILS) TO SEMICONDUCTOR PROCESSING

Author(s):
Harrison, H. B.
Johnson, S. T.
Cornish, B.
Adams. F. M.
Short, K. T.
Williams, J. S.
1 more
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. date:
1983
Page(from):
393
Page(to):
400
Pages:
8
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

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