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*APPLICATIONS OF LASER ANNEALING IN IC FABRICATION

Author(s):
Hess, L. D.
Eckhardt, G.
Kokorowski, S. A.
Olson, G. L.
Gupta, A.
Chi, Y. M>
Valdez, J. B.
Ito, C. R.
Nakaji, E. M.
Lou, L. F.
5 more
Publication title:
Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
13
Pub. Year:
1983
Page(from):
337
Page(to):
348
Pages:
12
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007889 [0444007881]
Language:
English
Call no.:
M23500/13
Type:
Conference Proceedings

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